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Lobster185Z340D-T2X0-C Wafer Robot

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semiconductor wafer handling
wafer handling automation

Lobster series 185Z340D-T2X0-C wafer handling robot is a two-armed wafer transfer robot with a rate payload of 2kg. Equipped with a high-tech wafer transfer system, it has extremely high accuracy, flexibility and safety.

Specification of Lobster185Z340D-T2X0-C Wafer Robot


Model

Lobster185Z340D-T2X0-C

Type

Two-armed

Applied Specification

~300

Rated Payload

2KG

Degree of Freedom

4

Range of Motion

Lifting Axis (Z)

340mm

Rotating Axis (T)

340deg

Stretching Axis (R)

360mm

Maximum Speed

Lifting Axis (Z)

400mm/s

Rotating Axis (T)

260deg/sec

Stretching Axis (R)

1500mm/s

Features

1) Cleanroom environment.

2) Robotic Arm Length: 135mm; 185mm.

3) Two-armed structure shortens the operation time of wafer replacement.

4) Mapping Sensor to detect if wafers are there, if overlying or tilting.

5) Specifications can be customized according to requirements.

Re-positioning Accuracy

±0.1mm

Leak Rate

Cleanliness

Class 100

Interface

I/O interface

4 configurable digital inputs;

4 configurable digital outputs;

8 general digital inputs;

8 general digital outputs;

(Re-extensible 8 digital inputs/outputs).

Ethernet

1

USB

2

RS232/RS485

1

Communication Protocol

Modbus-RTU/TCP、Socket

Arm Length (R)

185mm

Vertical Stroke (Z)

340mm

Machine Table Height (H)

605mm

Actuator Length (L)

Demand-based

Height from Table to Stroke’s Down Position (H)

250mm


Features of Lobster185Z340D-T2X0-C Wafer Transfer Robot

  • Two-armed; payload is 2kg; 

  • 4-degrees-of-freedom; 

  • Repositioning accuracy reaches ±0.1mm; 

  • Cleanliness reaches Class100.


Technical Drawing of Lobster185Z340D-T2X0-C Wafer Robot

Technical Drawing of Lobster185Z340D-T2X0-C Wafer Robot

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Phone
+86-571-8264-9522
Address
No.477 Hongxing Road, Xiaoshan Economic Development Zone, Hangzhou
Contact Us
No.477 Hongxing Road, Xiaoshan Economic Development Zone, Hangzhou
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